JPS6197839U - - Google Patents
Info
- Publication number
- JPS6197839U JPS6197839U JP18386184U JP18386184U JPS6197839U JP S6197839 U JPS6197839 U JP S6197839U JP 18386184 U JP18386184 U JP 18386184U JP 18386184 U JP18386184 U JP 18386184U JP S6197839 U JPS6197839 U JP S6197839U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- prober
- wafer
- pin
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 8
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18386184U JPS6197839U (en]) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18386184U JPS6197839U (en]) | 1984-12-04 | 1984-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6197839U true JPS6197839U (en]) | 1986-06-23 |
Family
ID=30741351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18386184U Pending JPS6197839U (en]) | 1984-12-04 | 1984-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197839U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6350034A (ja) * | 1986-08-20 | 1988-03-02 | Tokyo Electron Ltd | プロ−バ装置 |
-
1984
- 1984-12-04 JP JP18386184U patent/JPS6197839U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6350034A (ja) * | 1986-08-20 | 1988-03-02 | Tokyo Electron Ltd | プロ−バ装置 |